An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization

• Santiago H. Andany,
• Gregor Hlawacek,
• Stefan Hummel,
• Charlène Brillard,
• Mustafa Kangül and
• Georg E. Fantner

Beilstein J. Nanotechnol. 2020, 11, 1272–1279, doi:10.3762/bjnano.11.111

• integration. Keywords: atomic force microscopy (AFM); combined setup; correlative microscopy; helium ion microscopy (HIM); self-sensing cantilevers; Introduction Shortly after the invention of the atomic force microscope (AFM) in 1986 [1], efforts were made towards combining this scanning probe microscopy